High overtone acoustic resonator HBAR based onIDT’s/c-tilted ZnO/Si for timing applications

Type : Article de conférence
Auteur(s) :  F. Laidoudi, F. Medjili, C. CALIENDO, M. HAMIDULLAH, F. KANOUNI, F. Boubenider
Année :  2022
Domaine : Physique
Conférence: La Multi-Conférence Internationale sur les Systèmes, les Signaux et les Dispositifs (SSD)
Résumé en PDF :  (résumé en pdf)
Fulltext en PDF :  (.pdf)
Mots clés :  High overtone bulk acoustic modes, HBAR resonator, piezoelectric thin film, c-tilted ZnO, Frequency characteristics

Résumé : 

In this paper, the frequency characteristics ofhigh overtone bulk acoustic modes, generated by interdigitaltransducers IDT’s on c-tilted ZnO/Si, are theoretically andexperimentally investigated. The origin and characteristics ofhigh overtone acoustic modes in ZnO piezoelectric layer onsilicon substrate are discussed and one port HBAR resonator,based on c-axis tilted ZnO/Si, is fabricated and tested bynetwork analyzer. The results achieved in this work are ofinterest in design and fabrication of radiofrequency sourcesand electronic timing devices based on thin film technology