Effect of the c-axis tilting angle in piezoelectric ZnO crystal on the performances of electroacoustic SAW sensors

Type : Article de conférence
Auteur(s) :  Farouk LAIDOUDI, Fayçal Medjili, Hassene NEZZARI, Mouloud Mebarki, Fouad Boubenider
Année :  2020
Domaine : Physique
Conférence: XIIIèmes Journées Maghrébines des Sciences des Matériaux JMSM’2020
Résumé en PDF :  (résumé en pdf)
Fulltext en PDF :  (.pdf)
Mots clés :  surface acoustic waves, electroacoustic devices, Finite Element Analysis, Piezoelectric materials, c-tilted ZnO

Résumé : 

This paper aims to study the effect of c-axis tilting angle of piezoelectric ZnO/Si on the performances of electroacoustic SAW sensors, the dispersion curves of phase velocity, the electromechanical coupling factor K² and sensitivity to mass loading of Rayleigh and Sezawa modes are studied for different hZnO/λ and for different c-tilting angles (0, θ, 90°). The effect of the tilting angle θ on the performances of electroacoustic devices, is studied by finite element analysis. Based on the obtained results, SAW device is fabricated onto a ZnO/SiO2/Si multilayered structure. The obtained results show best performances and high sensitivity to gas and will contribute in enhancing the sensitivity and performances of SAW electroacoustic devices.