FINITE ELEMENT ANALYSIS OF AlN/Si THIN FILM RESONATOR

Type : Article de conférence
Auteur(s) :  F.LAIDOUDI, A. Reddaf, F.Boubenider
Année :  2015
Domaine : Physique
Conférence: 1er Congrès National de Physique et Chimie Quantique CPCQ 2015
Résumé en PDF :  (résumé en pdf)
Fulltext en PDF :  (.pdf)
Mots clés :  Surface acoustic wave, thin film resonator, FEM analysis

Résumé : 

This paper aim to study the influence of thin film thickness on the surface acoustic wave and reflectivity in AlN/Si resonator with Al electrodes, using finite element analysis. Mode shapes of the device as a function of frequency thickness were presented and results were obtained to optimize the design of SAW thin film devices that can work in high frequency.