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Amorphous SiC/c-ZnO-based Lamb mode sensor for liquid environments

Auteurs : Cinzia Caliendo, Muhammad Hamidullah, Farouk LAIDOUDI
Année : 2016
Domaine : Physique
Type : Communication
Conférence: 3rd International Electronic Conference on Sensors and Applications
Résumé en PDF : (résumé en pdf)
Fulltext en PDF : (.pdf)
Mots clés : Lamb S0 mode, Amorphous SiC-ZnO, sensors, viscous liquids

Résumé :

The propagation of the first symmetric Lamb mode S0 along ZnO/a-SiC thin composite plates was modeled and analysed aimed at the design of a sensor able to detect the changes of the environmental parameters, such as added mass in vacuum and the liquid viscosity changes in a viscous liquid medium. The Lamb mode propagation was modeled by numerically solving the system of coupled electro-mechanical field equations in the two media. The S0 acoustic field profile was calculated aimed at finding the proper plate thickness suitable for the propagation of longitudinally polarized modes. The phase velocity and electroacoustic coupling efficiency dispersion curves of the S0 mode were calculated aimed at the design of enhanced coupling efficiency devices. The gravimetric sensitivity in vacuum, and the attenuation that the S0 mode soffers when contacting a liquid viscous Newtonian environment were finally calculated for different ZnO layer thicknesses. Recently obtained results on the sputtering deposition of the a-SiC and ZnO thin and thick layers on Si substrates are also reported.