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Gas Sensors Elaboration Based to SnO2 and ZnO: application to the detection of CO, CO2 & NH3

Auteurs : I. Rahmani, L. Bahloul, H. MERADI, N. DAHMANI
Année : 2016
Domaine : Electronique
Type : Communication
Conférence: 7th African Conference on Non Destructive Testing (ACNDT 2016) & 5th International Conference on Welding, Non Destructive Testing and Materials and Alloys Industry (IC-WNDT-MI’16)
Résumé en PDF : (résumé en pdf)
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Mots clés : Thin films, sputtering, semiconductor, ZnO, SnO2, gas sensor.

Résumé :

The detection of toxic gas species, harmful, vital, corrosive or explosive into the atmosphere, an important area of research for industry, the environment and safety of public places. In order to remedy these requirements, it is particularly interested in the realization and mastery of gas sensors: reliable, sensitive, rapid and less expensive. Tin dioxide (SnO2) and zinc oxide (ZnO) are emerging as important materials for use in gas sensors. Tin dioxide is also a viable semiconductor candidate to replace the wide band gap zinc oxide window layer to improve the long-term device reliability. The film properties required by these two applications are different. In this paper, we propose an elaboration protocol of SnO2 and ZnO thin films, prepared by RF-DC magnetron sputtering on to glass substrates, under argon atmosphere at a substrates temperature of 350°C and 450°C, respectively.