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Elaboration of thin films : Gas Sensor Application

Auteurs : Bedoud Khouloud, Rahmani, Bahloul, Merabet, Meradi
Année : 2016
Domaine : Sciences des matériaux
Type : Communication
Conférence: 3rd International Conference on Embedded Systems in Telecommunications and Instrumentation ICESTI’16
Résumé en PDF : (résumé en pdf)
Fulltext en PDF :
Mots clés : thin films; sputtering; semiconductor; ZnO; SnO2; gas sensor.

Résumé :

Tin dioxide (SnO2) and zinc oxide (ZnO) are emerging as important materials for use in gaz sonsors. Tin dioxide is also a viable semiconductor candidate to replace the wide band gap zinc oxide window layer to improve the long-term device reliability. The film properties required by these two applications are different. In this paper, we propose an elaboration protocol of SnO2 and ZnO thin films, prepared by RF-DC magnetron sputtering on to glass substrates, under argon atmosphere at a substrates temperature of 350°C and 450°C, respectively